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Three-dimensional interferometric stage encoder using a single access port
dataset
posted on 2020-09-03, 10:26 authored by Kieran WisemanKieran Wiseman, Thomas KissingerThomas Kissinger, Ralph TatamRalph TatamResearch Data for Paper "Three-dimensional interferometric stage encoder using a single access port" by Kieran B. Wiseman, Thomas Kissinger and Ralph P. Tatam, Cranfield University, UK