Three-dimensional interferometric stage encoder using a single access port

dataset

posted on 2020-09-03, 10:26 authored by Kieran WisemanKieran Wiseman, Thomas KissingerThomas Kissinger, Ralph TatamRalph Tatam

Research Data for Paper "Three-dimensional interferometric stage encoder using a single access port" by Kieran B. Wiseman, Thomas Kissinger and Ralph P. Tatam, Cranfield University, UK

Funding

EPSRC UK EP/N509450/1

EPSRC UK EP/N002520/1

EPSRC UK EP/M020401/1

Royal Society Paul Instrument Fund PI150046

Royal Academy of Engineering Research Fellowship RF/201718/1745

History

Authoriser (e.g. PI/supervisor)

t.kissinger@cranfield.ac.uk

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Keywords

interferometric technique interferometric measurements Optical Encoding metrology applications metrology technique Photonics, Optoelectronics and Optical Communications Nanometrology

Licence

CC BY 4.0

Three-dimensional interferometric stage encoder using a single access port

Funding

EPSRC UK EP/N509450/1

EPSRC UK EP/N002520/1

EPSRC UK EP/M020401/1

Royal Society Paul Instrument Fund PI150046

Royal Academy of Engineering Research Fellowship RF/201718/1745

History

Authoriser (e.g. PI/supervisor)

Usage metrics

Categories

Keywords

Licence

Exports