Research Data for Paper "Three-dimensional interferometric stage encoder using a single access port" by Kieran B. Wiseman, Thomas Kissinger and Ralph P. Tatam, Cranfield University, UK
Funding
EPSRC UK EP/N509450/1
EPSRC UK EP/N002520/1
EPSRC UK EP/M020401/1
Royal Society Paul Instrument Fund PI150046
Royal Academy of Engineering Research Fellowship RF/201718/1745