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Three-dimensional interferometric stage encoder using a single access port

dataset
posted on 03.09.2020 by Kieran Wiseman, Thomas Kissinger, Ralph Tatam
Research Data for Paper "Three-dimensional interferometric stage encoder using a single access port" by Kieran B. Wiseman, Thomas Kissinger and Ralph P. Tatam, Cranfield University, UK

Funding

EPSRC UK EP/N509450/1

EPSRC UK EP/N002520/1

EPSRC UK EP/M020401/1

Royal Society Paul Instrument Fund PI150046

Royal Academy of Engineering Research Fellowship RF/201718/1745

History

Authoriser (e.g. PI/supervisor)

t.kissinger@cranfield.ac.uk

Licence

Exports