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Multiple intensity reference interferometry for the correction of sub-fringe displacement non-linearities - associated data

dataset

posted on 2021-11-19, 11:13 authored by Angus Bridges, Andrew Yacoot, Thomas KissingerThomas Kissinger, Ralph TatamRalph Tatam

Data associated with the publication "Multiple intensity reference interferometry for the correction of sub-fringe displacement non-linearities".

Funding

Optical metrology to support the next generation of nanopositioning

Engineering and Physical Sciences Research Council

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Royal Academy of Engineering Research Fellowship RF\201718\1745

National Measurement System Engineering Measurement Programme, funded by the UK government Department for Business, Energy and Industrial Strategy

History

Authoriser (e.g. PI/supervisor)

r.p.tatam@cranfield.ac.uk

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Multiple intensity reference interferometry for the correction of sub-fringe displacement non-linearities

Transport Systems

Transport Systems

Categories

Keywords

Interferometry Non-linearity Dimensional Metrology Optical Physics not elsewhere classified Nanometrology

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