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Correction of periodic displacement non-linearities by two-wavelength interferometry - associated data

dataset

posted on 2021-08-23, 09:26 authored by Angus Bridges, Andrew Yacoot, Thomas KissingerThomas Kissinger, David Humphreys, Ralph TatamRalph Tatam

Data associated with the publication "Correction of periodic displacement non-linearities by two-wavelength interferometry".

Funding

Industrial CASE Account - Cranfield University 2017

Engineering and Physical Sciences Research Council

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National Measurement System Engineering Measurement Programme (BEIS)

Royal Academy of Engineering Research Fellowship RF\201718\1745

History

Authoriser (e.g. PI/supervisor)

r.p.tatam@cranfield.ac.uk

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Transport Systems

Transport Systems

Categories

Keywords

Interferometry Non-linearity Dimensional Metrology Applied Physics Optical Physics not elsewhere classified

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