Data fo the paper "Surface Defects incorporated Diamond Machining of Silicon" GoelSaurav 2020 Data for the paper titled "Surface Defects incorporated Diamond Machining of Silicon" coauthored by <p><a></a></p><p>Neha Khatri *<sup>1</sup>, Borad M Barkachary <sup>2</sup>, B Muneeswaran <sup>3, </sup>Rajab Al-Sayegh <sup>4</sup>, Xichun Luo <sup>5</sup> and Saurav Goel <sup>+6,7,8</sup></p>